Silane (SiH₄) Gas – 5 ppm

Description

Calibration Gas Specifications

• Cylinder Size: 60 Liters

• Target gas: Silane (SiH₄)

• Concentration: 5 ppm

• Balance gas: Nitrogen (N₂)

Available Silane (SiH₄) Gas Concentrations

• 5 ppm SiH₄ Calibration Gas (low-level detection)

• 10 ppm SiH₄ Calibration Gas (standard monitoring)

• 20 ppm SiH₄ Calibration Gas (higher-range applications)